基于热反射法的微纳结构热扫描技术研究

Research of Micro-nano Thermal Scanning Based on Thermoreflectance

中文关键词: 飞秒激光  光热反射率  热导率  空间分辨率  抽运-探测

英文关键词: femtosecond laser, thermoreflectance, thermal conductivity, spatial resolution, pump-probe

中文摘要:

      随着微电子及微纳加工技术的飞速发展，电子器件的发热和热管理成为制约器件性能进一步提升的关键因素，微纳结构的热物性是电子器件热设计中最关键的参数之一，因而对微纳结构材料的热物性进行测量，对于微纳器件和材料的热设计和热优化具有极为重要的意义。基于光热反射法，利用双波长飞秒激光抽运探测热反射系统对微纳结构材料的热物性进行了测量。此外，还通过样品表面的微区热扫描，实现了对微纳结构形貌和热性质的对比和表征，并分析了系统的空间分辨率。

英文摘要:

      With the rapid development of microelectronics and micro-nano processing technology, heating and thermal management of electronic devices become key factors that restrict the further improvement of device performance. The thermal properties of micro-nano structure is one of the most critical parameters in thermal design of electronic devices. Therefore measuring the thermal properties of the micro-nano structure material is of great significance to the thermal design and thermal optimization of micro-nano devices and materials. Based on thermoreflectance method, the thermal properties of micro-nano structure materials are measured by using the dual-wavelength femtosecond laser pump and probe thermo-reflectance system . In addition, the comparison and characterization of the topography and thermal property of the micro-nano structure were achieved by micro-area thermal scanning of the sample surface, and the spatial resolution of the system was analyzed at the same time.